한양대학교 나노바이오 전자재료 및 공정 연구실 - NEMPL

EMPL 한양대학교 전자재로 및 공정 연구실

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Lab Intro

Electronic Materials & Processing Lab. : The Electronic Materials and Processing Lab (NEMPL) started with the appointment of Professor Jin-Goo Park at Honyang University in 1994. NEMPL's research focus is on the surface and colloidal phonomena in the area of semiconductor and electronic materials and processing. Due to its unique background in discipline, no other lab is working on NEMPL's research area in Korea. Some areas are unique in the world even.

  • The major research interests can be divided in the wafer cleaning, Chemical Mechanical Planerization (CMP) and Bio-MEMS. In the research area of the microcontamination control during electronic and semiconductor device fabrication, we put our emphasis on the environmentally benign process and the mechanism of adhesion and removal of contaminants. We have class 1000 and class 100 cleanrooms and class 10 mini environment along with cleaning wet stations (with Megasonics) and metrology tools including Tencor's Surface Particle Scanner for the particle adhesion and removal research. Ozone cleaning is another area of interest. New IPA cleaning and drying technology is developed in our lab and working for commercialization. Cleaning process for nano imprinting has been a new area of research.
  • In CMP, we focused on metal CMP processes including Cu, Ru and Pt including low kmaterials, Started with the understanding of slurry formulation, the evaluation of process itself is the main activity including the post CMP cleaning. For the CMP research we have two CMP polishers with a wafer scrubber and other metrology tools including nanospec, four  point probe, particle size and zeta potential analyzer. CMP process for MEMS application is another major thrust of interest in our research. Since much higher removal rate and meterial selectivity are required in MEMS fabrication. design of slurry chemistry is essential part of MEMS CMP slurry. The adhesion force of slurry particles on polished wafer surface has been soutinely measured and evaluated in our lab using AFM force-distance curve method.
  • Bio-MEMs is a very interdisciplinary research area. With the co-work with Biochemistry department and MicroBiochip Center, we are now working on electrowetting. DNA extraction and perfusion system for high content screening. Plastic based lab-on-a-chip has been routinely fabricated in our lab. For the process, hot mmebossing process of polymer materials has been studied. Also deep oxide etcher has been used for the glass chip fabrication. We also do reserach on the modification of surfaces with fluorocarbon films for the prevention of stiction in MEMES and Bio-MEMS structures. We modify metallic and nonmetallic surfaces to highly hydrophobic surfaces by chemical vapor deposition methed.
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