한양대학교 나노바이오 전자재료 및 공정 연구실 - NEMPL

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연구업적

  • 총논문수 : 12
2012년
Ji-Hyun Jeong, Bong-Kyun Kang, Min-Su Kim, Hong-Seong Sohn, Ahmed A. Busnaina, and Jin-Goo Park Evaluation of very dilute alkaline solutions for wafer cleaning with megasonic irradiation The 16th Cleaning Technology Symposium of Korea SCUGM, October 11, Ansan, Korea
Ji-Hyun Jeong, Bong-Kyun Kang, Min-Su Kim, Hong-Seong Sohn, Ahmed A. Busnaina, and Jin-Goo Park Evaluation of very dilute alkaline solutions for wafer cleaning with megasonic irradiation The 16th Cleaning Technology Symposium of Korea SCUGM, October 11, Ansan, Korea
Jin-Goo Park Research Issues for Surface Preparation from SPCC 2012 The 15th Cleaning Technology Symposium of Korea SCUGM, April 19, Ansan, Korea
Jung-Soo Lim, R. Prasanna Venkatesh and Jin-Goo Park The Effect of Pulsative and Continuous Chemical Supply on Oxide Wet Etching and Cleaning The 15th Cleaning Technology Symposium of Korea SCUGM, April 19, Ansan, Korea
Jin-Goo Park, Tae-Young Kwon, and Hyuk-Min Kim Review on ICPT 2012 The 51th Technical Meeting of Korea CMPUGM, November 08, Suwon, Korea
Tae-Young Kwon, Byoung-Jun Cho, Prasanna Venkatesh, and Jin-Goo Park Correlation of Polishing pad Property and Pad debris on Scratch Formation during CMP The 51th Technical Meeting of Korea CMPUGM, November 08, Suwon, Korea
Hassan Hafeez, Si-Hyeong Cho, Dong-Ho Han, Young-Gil Seo, Jin-Goo park Development of One Step Transfer Method of Hydrophobic Surface on Polyester Fabric 23th Material Research Society of Korea (K-MRS, 한국재료학회), November 8 - 9 (2012), Rakai sand pine resort, Gangneung abstract(hassan).pdf
Hailin Xiong, Hyuk-Min Kim, R. Manivannan, Jin-Hyeong Noh, Deog-Ju Moon, Jin-Goo Park Investigation of Sapphire lapping process using Fixed Diamond Abrasive Pad 23th Material Research Society of Korea (K-MRS, 한국재료학회), November 8 - 9 (2012), Rakai sand pine resort, Gangneung abstract(hailin).pdf
Yoon-Sik Cho, Min-Su Kim, Bong-Kyun Kang, Jae-Kwan Kim, Byung-Kyu Lee and Jin-Goo Park 나노임프린트 리소그래피의 quartz stamp 재사용을 위한 UV cured resin 제거에 관한 연구 The removal process of UV cured resin on quartz stamp during the process of UV-NIL 23th Material Research Society of Korea (K-MRS, 한국재료학회), November 8 - 9 (2012), Rakai sand pine resort, Gangneung abstract(윤식).pdf
Yoon-Sik Cho, Min-Su Kim, Bong-Kyun Kang,Jae-Kwan Kim, Byung-Kyu Lee, Jin-Goo Park The hybrid cleaning process for the removal of resin mold on quartz substrate during the process of UV-NIL 2012 Material Research Society of Korea(KMRS, 한국재료학회), May 17 - 18 (2012), Muju deogyusan resort, Muju
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