한양대학교 나노바이오 전자재료 및 공정 연구실 - NEMPL

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연구업적

  • 총논문수 : 20
2012년
Min-Su Kim, Bong-Kyun Kang, Hoo-Mi Choi,Tae-Sung Kim, Jin-Goo Park Evaluation of Cleaning Performance of Nano-sized CO2 Gas Cluster for Damage Free Semiconductor Cleaning 9th International Conference on Flow Dynamics(ICFD), September 19 - 21 (2012), Sendai, Japan ICFD2012_MS.pptx
Bong-Kyun Kang, Ji-Hyun Jeong, Yoon-Sik Cho, Min-Su Kim, Hong-Seong Sohn, Ahmed A. Busnaina, Jin-Goo Park Experimental and Theoretical Investigation of Acoustic Cavitation Behavior in the Megasonic Cleaning 9th International Conference on Flow Dynamics(ICFD), September 19 - 21 (2012), Sendai, Japan ICFD2012_HYU_BKKang.pdf
Jin-Goo Park, Bong-Kyun Kang and Manivannan Ramachandran Challenges in 1x Design Node Semiconductor Device Cleaning (Invited ) 9th International Conference on Flow Dynamics(ICFD), September 19 - 21 (2012), Sendai, Japan
J.H. Jeong, B.K. Kang, M.S. Kim, H.S. Sohn, A.A. Busnaina and J.G. Park Evaluation of Very Dilute Alkaline Solutions for Wafer Cleaning with Megasonic Irradiation 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces(UCPSS), September 16 - 19 (2012), Ghent, Belgium UCPSS_JJH.pptx
B.K. Kang, J.H. Jeong, M.S. Kim, H.S. Sohn, A.A. Busnaina and J.G. Park Acoustic Cavitation Behavior in Isopropyl Alcohol Added Cleaning Solution 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces(UCPSS), September 16 - 19 (2012), Ghent, Belgium Experimental and theoretical investigation of MS_BK_v1.pptx
Jung-Soo Lim, R. Prasanna Venkatesh and Jin-Goo Park The Effect of Pulsative and Continous Chemical Supply on Oxide Wet Etching and Cleaning SEMATECH Surafce Preparation and Cleaning Conference(SPCC), March 19 - 21 (2012), Austin, Texas
M.S. Kim, B.K. Kang, J.K. Kim, B.K. Lee and J.G. Park Removal of UV Cured Resin Using Hybrid Cleaning Method 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces(UCPSS), September 16 - 19 (2012), Ghent, Belgium UCPSS 2012 Resin removal_KMS_v1.ppt
Jung-Hwan Lee, Si-Hyeong Cho, Hyun-Woo Lim, Sung-Woo Kim, Ahmed. A. Busnaina, HeaYeon Lee and Jin-Goo Park Study of highly selective and sensitive microarray structure based on hydrophilic/hydrophobic SAMs(Self Assembled Monolayers) 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces(UCPSS), September 16 - 19 (2012), Ghent, Belgium ID25_Extended Abstract.pdf
Min-Su Kim, Bong-Kyun Kang, Jae-Kwan Kim, Byung-Kyu Lee and Jin-Goo Park Revmoal of UV cured resin mold on quartz using UV/O3 cleaning for Nanoimprinting Lithography SEMATECH Surafce Preparation and Cleaning Conference(SPCC), March 19 - 21 (2012), Austin, Texas
H.H. Lee, M.S. Yun, H.W. Lee and J.G. Park Removing W Polymer Residue from BEOL Structures Using DSP+ (Dilute Sulfuric-Peroxide-HF) Mixture – A Case Study 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces(UCPSS), September 16 - 19 (2012), Ghent, Belgium 2012_UCPSS_LHH_final.pdf
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