한양대학교 나노바이오 전자재료 및 공정 연구실 - NEMPL

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  • 총논문수 : 10
2012년
Jin-Goo Park, Tae-Young Kwon, R. Prasanna Venkatesh and Byoung-Jun Cho CMP defects; their detection and analysis on root causes Electrochemical Society (ECS)Transactions, Vol. 44 (1) (2012), pp. 559-564 The defects_Their detection and analysis on root course.pdf
Tae-Gon Kim, Antoine Pacco, Kurt Wostyn, Steven Brems, XiuMei Xu, Herbert Struyf, Kai Arstila, B. Vandevelde, Jin-Goo Park, Stefan De Gendt, Paul W. Mertens and Marc Heyns Effects of Interfacial Strength and Dimension of Structures on Physical Cleaning Window Solid State Phenomena Vol. 187 (2012), pp. 123-126 Effects of interfacial strength and dimension of structures on physical cleaning window.pdf
R. Prasanna Venkatesh, Byoung Jun Cho, S. Ramanathan and Jin-Goo Park Electrochemical impedance spectroscopy (EIS) analysis of BTA removal by TMAH during post Cu CMP cleaning process Journal of the Electrochemical Society, Vol. 159 (11) (2012), pp. C447-C452. JESoc_EIS_BTA_TMAH.pdf
JUNG-SOO LIM, R. PRASANNA VENKATESH, JIN-GOO PARK The effect of pumping methods on wet etching processes Solid State Technology, Vol. 55 (3) (2012), pp. 18-21 The effect of pumping meth_SST_vol55_Issue03.pdf
Seung-ho Lee, Bong-kyun Kang, Min-su Kim, Jin-ho Ahn, Han-ku Cho, Han-shin Lee, and Jin-Goo Park Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask Japanese Journal of Applied Physics, Vol. 51 (2012), pp. 096503-1-096503-6 승호형논문.pdf
R. Prasanna Venkatesh, Y. Nagendra Prasad, Tae-Young Kwon, Young-Jae Kang, and Jin-Goo Park Effect of Alkaline pH on Polishing and Etching of Single and Polycrystalline Silicon Japanese Journal of Applied Physis, Vol. 51 (2012), pp. 071301-1-071301-6 Effect of Alkaline pH on Polishing and Etching of Single and Polycrystalline Silicon.pdf
Hyuk-Min Kim, R. Prasanna Venkatesh, Tae-Young Kwon, Jin-Goo Park Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 411 (2012), pp. 122-128 Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing.pdf
Tae Hoon Kim, Ahmed Busnaina, Jin-Goo Park and Dongsik Kim Nanoscale Particle Removal Using Wet Laser Shockwave Cleaning The Society for Solid-State and Electrochemical Science and Technology, Vol. 1 (2) (2012), pp. 70-77 P70.full.pdf
Moonkwon Lee, Ki Hyung Kim, Jin-Goo Park, Jung-Hwan Lee, Hyun-Woo Lim, Min-Yi Park, Soo-Ik Chang, Eun Kyu Lee, Dong Woo Lim and Jaebum Choo Fabrication of a hydrophobic/hydrophilic hybrid-patterned microarray chip and its application to a cancer marker immunoassay Biochip Journal, Vol. 6, (1) (2012), pp. 10-16 BiochipJ-2012.pdf
Jung-Ki Lee, Si-Hyeong Cho, Muhammad Rizwan, Bong-Young Yoo, and Jin-Goo Park Fabrication of Large-Area CoNi Mold for Nanoimprint Lithography Japanese Journal of Applied Physics, Vol. 51 (2012), 026503-1-026503-5 JJAP-51-026503[2].pdf
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