한양대학교 나노바이오 전자재료 및 공정 연구실 - NEMPL

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교수님소개

Professor, Jin-goo Park : (우) 425-791 경기도 안산시 상록구 사1동 1271 한양대학교 제5공학관 309호, 전화: 031-400-5226, 팩스 : 031-417-3701, 이메일 : jgpark@hanyang.ac.kr

  • Education Ph.D., Materials Science and Engineering, University of Arizona, May 1993.
    M.S., Materials Science and Engineering, University of Arizona, December 1988.
    B.S., Metallurgy and Materials Engineering, Hanyang University, February 1984.
  • Major Areas Of Interest Wet Cleaning Processes/Chemicals in Semiconductor and Electronic Materials Fabrication, Chemical Mechanical Polishing, Slurry, Post CMP Cleaning, Particle/Metallic Removal and Adhesion, Bio-MEMS, Hot Embossing
  • Reserch Experience Wet Cleaning Processes/Chemicals in Semiconductor and Electronic
    Materials Fabrication
    Nanocontamination Control
    Chemical Mechanical Polishing of Cu, Ru, Pt and Low k materials
    Post CMP Cleaning
    Slurry Characterization/Formulation
    Surface Modification with Fluorocarbon Films,
    Wettability of Surfaces
    Particle/Metallic Removal and Adhesion
    Bio-MEMS, Nanoimprinting
  • Professional Activities Editorial committee member of Journal of Korean Microelectronics and
    Packaging Society
    Technical Advisor for Surface Electro Optics, Ansan, Korea
    Technical Advisor for IMT, YoungIn, Korea
    Research Director of Hunetech, Ansan, Korea
    President of Korea CMP Users Group Meeting
    Technical Advisory Member of SemiAcademy, Korea
  • Professional Affiliation The Electrochemical Society (Member)
    Materials Research Society (Member)
    American Vacuum Society (Member)
    Korean Materials Research Society (Life Member)
    Korean Institute of Metals and Materials (Life Member)
    Korean Institute of Surface Engineering (Member)
    Korean Microelectronics and Packaging Society (Editorial Member)
    The National Academy of Engineering of Korea (Member)
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