한양대학교 나노바이오 전자재료 및 공정 연구실 - NEMPL

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보유시설및장비

Atomic Force Microscopy
모델명/제조사 XE-100 / Park Systems(Korea)
주요사항 Specification - X,Y Scanner: 50 um - Z Scanner: 12 um - Laser Source: SLD (Wavelength: ~ 830 nm, Coherence length: < 50 micron) Imageing Mode - Contact - Tapping/Noncontact - Lateral Force - Force Modulation Acessorieses - Active Vibration System (TS-150) - Nanolithography - Signal Access Module - Open Liquid Cell - Electrochemistry Cell - XER Location - Cleanroom (10 class)
주요용도 Fundamental Studying for - Interaction Force Measurement between Particles and Surfaces - Measurement of Pattern Collapse Force - Electrochemistry - Chemical Mechanical Polishing - Surface Characterization
담당자 한광민 연구원
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