한양대학교 나노바이오 전자재료 및 공정 연구실 - NEMPL

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보유시설및장비

장비명 모델명 용도 제조사
Spin Coater GMS-120 PR coating Genesys (Korea)
PE-CVD (Ⅰ) Lab80Plus Thin Film Deposition Oxford (England)
PE-CVD (Ⅱ) SRN-504 NH2 Layer Deposition Carbon Layer Deposition Sorona (Korea)
Contact Angle Analyzer Phoenix 300 Contact Angle & Surface Energy Measurement SEO (Korea)
Asher Glen-R3A Plasma Cleaning & Surface Treatment Yes (USA)
Aligner EVG-620 Align & Exposure EVG (Austria)
3D-profiler U-Surf Non-Contact 3D Surface Measurement Nanofocus (Germany)
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